Presented here is an extensive product design and engineering effort, from the ground up of a Semiconductor Wet Processing System. This new system is capable of fully automated, cassette-to-cassette, true single-sided wet processing of 1-12" substrates. This is achieved without disturbing or contaminating the unprocessed side of the substrates.
Vertex Product Development's role in this project was the overall design and looks of the machine as well as, mechanical engineering, electrical engineering, programming & GUI design and complete system integration with a Genmark EFEM mini environment unit. In addition Vertex was in-charged of production, assembly, testing and installation of system in the fab.